Dr. Thomas Goossens (ASML) : “Metrology for high volume chip manufacturing: Nanoscale precision with optical microscopy”

Speaker: Dr. Thomas Goossens (ASML)

Title: Metrology for high volume chip manufacturing: Nanoscale precision with optical microscopy

Video: Click here to view talk

Abstract: Modern computer chips are built layer by layer using optical lithography, where nanometric control of the registration error—known as overlay—is essential for performance and yield. Precise control requires precise measurement techniques – and they better be fast!
This talk covers industry-proven and novel advanced optical microscopy techniques to measure overlay errors with precision and speed.  We’ll cover the physics, optics, and methods that enable cutting-edge semiconductor processes.

Bio: Thomas Goossens is a researcher at ASML in the Netherlands, where he develops advanced metrology techniques to measure and control nanoscale features in modern computer chips. Previously, he was a postdoctoral fellow at Stanford University working on image system simulation and hyperspectral filter technology. He obtained his Ph.D. at KU Leuven (Belgium) in collaboration with IMEC, focusing on hyperspectral imaging technology.